Waag Group, Technische Universität Braunschweig
The Institute of Semiconductor Technology (IHT) at the TU Braunschweig (TUBS), headed by Professor Andreas Waag, offers the infrastructure for fabrication, processing and testing of semiconductor devices in the fields of electronics, optoelectronics as well as sensor devices. The TUBS group is working on silicon as well as wide band gap semiconductors like ZnO and GaN, but also magnetic materials like GaMnAs and the InP/Silicon heteroepitaxy for many years, and has focused on the fabrication of semiconductor nanorods recently. For the growth of GaN-based heterostructures, a new Thomas Swan 3x2 inch reactor is available, using a vertical showerhead design, allowing to fabricate state of the art GaN based heterostructures.
The TUBS group also has strong experience in the 3-dimensional processing of silicon, e.g. for silicon based micromechanics. Besides conventional epitaxy of wide band gap materials, a strong experience in the fabrication and processing of nanorods is available.